Electron optical system of epma 電子探針的電子光學(xué)系統(tǒng)
Design of electron optical system for electron gun for electron beam welding 電子束焊接電子槍電子光學(xué)系統(tǒng)設(shè)計(jì)
A highly efficient numerical algorithm by using multi - grid method ( mgm ) is introduced to solve the three dimensional field distribution in the present paper . formulae of the restriction and prolongation in mgm computation is deduced , and a 3d program of mgm is accomplished , which can solve the field distributions in electron optical systems for various electrostatic lenses . the 3d field distribution in an electrostatic concentric spherical model is tested with mgm algorithm and an algorithm based on finite difference method ( fdm ) respectively . comparing these two results in view of computational efficiency and computational accuracy , it appears that mgm is superior to fdm in solving electrostatic field distribution for the electron optics problem . this paper shows that the 3d field computation using mgm greatly improves the computational efficiency of field distributions in electron optical systems and shortens the computational time 本文將一種高效率的數(shù)值計(jì)算方法? ?多重網(wǎng)格法引入三維靜電場(chǎng)分布的計(jì)算,多重網(wǎng)格法利用限制和延拓可迅速求得滿足精度要求的場(chǎng)分布.研究了求解各種靜電透鏡電子光學(xué)系統(tǒng)三維場(chǎng)分布的多重網(wǎng)格法程序,驗(yàn)算了靜電同心球模型的三維場(chǎng)分布.通過(guò)與目前在場(chǎng)計(jì)算中常用的有限差分法進(jìn)行比較,可以看出多重網(wǎng)格法的計(jì)算效率和計(jì)算精度優(yōu)于有限差分法.本文表明利用多重網(wǎng)格法計(jì)算三維場(chǎng)大大提高了場(chǎng)分布的計(jì)算效率,縮短了計(jì)算時(shí)間,因此為后續(xù)計(jì)算打下了良好的基礎(chǔ)